姘ｉ珨鍚嶇ū | 鍖栧(xu茅)寮� | 绱斿害(%) | 闆滆唱(zh矛)(ppm) |
楂樼磾姘︽埃 | He | 99.999% | O2锛�1,CH4锛�0.5, CO2锛�0.5, Ne锛�4 ,H2锛�1, CO锛�0.5 ,H2O锛�3 ,N2锛� |
楂樼磾姘埃 | Ar | 99.999% | O2鈮�1.5 ,CH4鈮�0.4, N2鈮�4, H2鈮�0.5, H2O鈮�3锛孋O鈮�0.3,CO2鈮�0.3 |
楂樼磾姘埃 | H2 | 99.999% | O2鈮�1 ,CO2鈮�1, N2鈮�5, CH4鈮�1 ,CO鈮�1 ,H2O鈮� |
楂樼磾姘埃 | N2 | 99.999% | O2鈮�3 ,H2O鈮�3, H2鈮�1, HC鈮� |
浜屾哀鍖栫⒊ | CO2 | 99.999% | O2鈮�1,H2O鈮�2,N2鈮�5,CO鈮�1,HC鈮� |
涓�姘у寲纰� | CO | 99.99% | H2锛�10,O2+Ar锛�10,N2锛�50锛孋O2锛�20锛孒2O锛�5锛孴HC锛� |
浜屾哀鍖栫～ | SO2 | 99.9% | 姘�+姘�<100,姘�<10,鍏朵粬<200 |
涓�姘у寲姘� | NO | 99.5% | 姘у寲浜炴爱<4000,浜屾哀鍖栨爱<2000,姘埃<300,浜屾哀鍖栫⒊<500 |
纭寲姘� | H2S | 99.9% | 姘埃<200ppm,姘ф埃+姘埃<100ppm,姘�<3ppm |
姘寲姘� | HCL | 99.9% | H2鈮�50 02+Ar鈮�30 N2鈮�450 THC鈮�5 CO鈮�60 CO2鈮�400 H20鈮� |
姘� | NH3 | 99.999% | 姘ф埃 <1.0ppm,姘埃 <2.0ppm,涓�姘у寲纰�<1.0ppm,姘�<2.0ppm,THC(C1~C3) <1.0ppm |
鍏盁鍖栫～ | SF6 | 99.999% | O2+Ar鈮�2 ,N2鈮�2锛孒20鈮�3, HF鈮�0.1, CF4鈮�1锛孋O鈮�0.5锛� CO2鈮�0.5锛孋H4鈮�0.5 |
鍚堟垚绌烘埃 | Air | O2:19.5锝�22.5% | H2O鈮�5, CO/CO2鈮�0.5, THC鈮� |
闆�绱�绌烘埃 | Air | O2: 19.5锝�22.5% | H2O鈮�5, CO/CO2鈮�0.5, THC鈮�0.1 |